| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized capacitance type probe device of high performance and a displacement measuring circuit using the device. SOLUTION: This capacitance type probe device is formed by working a laminated board of a silicon board/an insulating layer/a silicon board. An unnecessary part of a first silicon board is eliminated by etching, and a retaining board 1 is formed. By etching a second silicon board, a probe 2 is formed which is provided with a base end electrode part 2b fixed to the retaining board 1 by using an insulating layer 11 and a beam part 2a which is isolated from the retaining board 1 by eliminating the insulating layer 11 as a substratum. By etching the second silicon board, a pair of detecting electrode parts 3, 4 are formed which are fixed to the retaining board 1 by using the insulating layer 11 and arranged so as to pinch parts of the beam part 2a which parts are adjacent to the base end electrode part 2b and whose side surfaces are subjected to capacitive coupling with a side surface of the beam part 2a. Transformation of the tip of the probe 2 which is generated by contact with an object to be measured is detected by differential capacitance change between the probe 2 and a pair of the detecting electrode parts 3, 4.
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