Piezoelektrisk positioneringsanordning samt metod för positionering

摘要

The piezoelectric positioning device for e.g. atomic force microscopy comprises a vibrator (2) contacting a transmission element (1) for the object being positioned. Also claimed is a process using the device. CLAIMED PROCESS - The process applies A.C. to the vibrator rod (3) for controlled drive at point (F) along the line of symmetry of the e.g. ellipsoidal zone (5) of the vibrator. EMBODIMENT - A platform (9) and elastic elements (10) stabilise the structure.