LIQUID DROP EJECTION HEAD AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To solve a problem that the pressure in a gap space increases to lower the displacement efficiency of a diaphragm. SOLUTION: A second recess 18 is formed in the bottom face of a recess 14 in an electrode substrate 2 and an electrode 15 is formed on the entire surface thus forming protrusions and recesses having recesses 19 for interconnecting the electrode side and a gap space 16.