| 摘要 |
Disclosed is a dicing method using a dicing apparatus comprising at least a chuck table holding workpiece attached a frame via an adhesive tape, and dicing means for cutting a workpiece into small square pieces. The workpiece is cut into small square pieces in the state of being held in the frame, and a blow of air is ejected from the surface of the chuck table to the diced workpiece to expand the adhesive tape in the semispherical form. As a result, adjacent square pieces are put apart from each other, thus making adjacent square pieces even if they remain partly contiguous to be forcedly put apart from each other.
|
