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发明名称
摘要
申请公布号
JP3253477(B2)
申请公布日期
2002.02.04
申请号
JP19950054384
申请日期
1995.03.14
申请人
发明人
分类号
H01L21/82;G06F17/50;(IPC1-7):H01L21/82
主分类号
H01L21/82
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