SYSTEME D'INTERCONNEXION OPTIQUE POUR CIRCUIT INTEGRE REALISE SUR UN SUBSTRAT SOI

摘要

The invention concerns an optical interconnection system in a microelectronic circuit produced on a SOI substrate (30), that is a substrate having a silicon film (33) supported by an electrically insulating material (32), the microelectronic circuit comprising at least a functional block to be connected produced in the silicon film. The system comprises at least an optical microguide consisting of a strip (40) delimited in the silicon film by lateral confinement zones (41, 42) to connect the functional block.