发明名称 PROCEDE DE REALISATION D'UNE CIRCUITERIE COMPORTANT PISTES, PASTILLES ET MICROTRAVERSEES CONDUCTRICES ET UTILISATION DE CE PROCEDE POUR LA REALISATION DE CIRCUITS IMPRIMES ET DE MODULES MULTICOUCHES A HAUTE DENSITE D'INTEGRATION
摘要 <p>The invention concerns a method for making a circuitry comprising conductive tracks, chips and micro-vias, at the top surface of a dielectric (303) consisting of a polymer matrix, a compound capable of inducing subsequent metallization and, if required one or several non-conductive and inert fillers, said dielectric (303) covering a level of circuitry (302) or metallized layer, which comprises steps which consist in: a) perforating right through said dielectric (303) without perforating the subjacent metallized layer or the subjacent level of circuitry (302), so as to form one or several micro-vias (304) at desired sites; b) forming, by metallization, metal tracks (312), chips (313) and micro-vias (311) at the surface of the dielectric (314) and of the micro-vias (304), while providing selective protection by depositing a protective layer.</p>
申请公布号 FR2812515(A1) 申请公布日期 2002.02.01
申请号 FR20000009879 申请日期 2000.07.27
申请人 KERMEL 发明人 CASSAT ROBERT;LORENTZ VINCENT
分类号 C23C18/16;C23C18/31;H05K3/00;H05K3/10;H05K3/18;H05K3/40;H05K3/42;H05K3/46;(IPC1-7):H05K3/42;H05K1/09 主分类号 C23C18/16
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