| 摘要 |
PURPOSE: A carbon nano-tube FED(field emission display) device and a method for manufacturing the same are provided to facilitate electrical characteristics and structural manufacture by growing carbon nano-tube on a metal substrate. CONSTITUTION: A carbon nano-tube FED comprises a glass substrate(1), an Invar substrate(2) on the glass substrate(1), an insulating layer(3) on the Invar substrate(2), gate electrodes(4), an insulating layer(5) on the insulating layer(3), and a carbon nano-tube(6). The carbon nano-tube FED is manufactured by forming the gate electrodes(4) of 0.1-1 micrometer after forming the insulating layer(3) on the Invar substrate(2), forming the insulating film(5) over the gate electrodes(4), etching to expose the Invar substrate(2) for growing carbon nano-tube between the gate electrodes(4), forming seeds for the carbon nano-tube, and selectively growing the carbon nano-tube using chemical vapor deposition method.
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