WAFER CARRIER USED IN BACK-END PROCESS OF WAFER

摘要

PURPOSE: A wafer carrier used in a back-end process of a wafer is provided to transfer easily a wafer carrier from a clean room to an outside by improving a structure of the wafer carrier. CONSTITUTION: A wafer carrier(200) has a carrier box(210) for forming main body. A wafer cassette for loading a wafer is mounted in the carrier box(210). A door(220) is adhered to a front face of the carrier box(210). The door(220) and the carrier box(210) are sealed to transfer stably the wafer carrier(200) from a clean room to the outside. A gasket is formed on an outer circumference of an inner side of the door(220). The door(220) is combined with the carrier box(210) by a combination device(230). An inside of the wafer carrier(200) forms a vacuum by the gasket. The combination device(230) is formed with a fixing plate and an elastic hook portion. A flange(240) is formed on an upper face of the carrier box(210). One or more projection portion(254) is formed on the upper face of the carrier box(210) in order to stack two or more carrier boxes.