发明名称 POLISHING TOOL AND MANUFACTURING METHOD THEREFOR
摘要 PURPOSE: A polishing tool and a method for manufacturing the polishing tool are provided to exhibit a stable speed of polishing and good surface flatness, and to reduce various defects such as scratches created on the polished surface of a polishing object of various types. CONSTITUTION: A polishing tool(1) is operated by pressing and sliding on the polishing object in a swinging motion and the surface is polished with abrasive particles(5) imbedded in a matrix(4) comprised primarily of a thermoplastic resin such as butadiene styrene, polybutadiene or MBS resin of acryl rubber group. The polishing tool(1) includes fixed-abrasive polishing tool that contains abrasive particles within the polishing tool, or a polishing pad containing non-fixed-abrasive particles.
申请公布号 KR20020009510(A) 申请公布日期 2002.02.01
申请号 KR20010044866 申请日期 2001.07.25
申请人 EBARA CORP. 发明人 HIROKAWA KAZUTO;HIYAMA HIROKUNI;MATSUO HISANORI;WADA YUTAKA
分类号 B24D3/28;B24B37/04;B24B37/24;B24D3/32;B24D3/34;B24D18/00;H01L21/306;(IPC1-7):B24D3/28 主分类号 B24D3/28
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