| 摘要 |
PROBLEM TO BE SOLVED: To provide a molecular pump capable of heating a stator of a thread groove vacuum pump part without raising temperature of a easing so much and reducing electric power consumption for the heating concerning the composite molecular pump to exhaust gas having a condensing property. SOLUTION: Parts 6b, 6c, 6d, 6e of the casing are formed into a first magnetic body made of ferromagnetic materials of high electric resistance, a coil 8 is wound around an inner peripheral part of the firs magnetic body, the stator 3a on an inner peripheral part of the coil 8 is formed into a second magnetic body made of ferromagnetic materials of low electric resistance, and the coil 8 is surrounded by these first magnetic body and second magnetic body.
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