SELF-ALIGNED METAL SILICIDE

摘要

A structure of self-aligned metal silicide. A gate oxide layer is formed on a substrate. A gate with a sidewall and a top surface thereof is formed on the gate oxide layer. A first silicidation step is performed to form a first metal silicide layer on both the sidewall and the top surface. A spacer is formed to cover the first metal silicide layer on the sidewall of the gate. An ion implantation is performed to form a source/drain region in the substrate with the gate as a mask. A second silicidation step is formed to form a second metal silicide layer on the source/drain region.