COUPLING ELEMENTS FOR SURFACE PLASMON RESONANCE SENSORS

摘要

The present invention provides configurations and a method of formation of optical coupling elements for surface plasmon resonance sensors. In the meth od of the present invention, interference patterns between two overlapping monochromatic coherent light beams are created on a photosensitive film disposed on a master substrate. At least one of the light beams has an obliq ue angle of incidence onto the master substrate, and the focal points of the tw o overlapping light beams are positioned in order to reduce optical aberration s up to third order. After developing the photsensitive film, the surface reli ef patterns pattern created on the master substrate is replicated as diffractiv e optical elements onto SPR sensor chips. The diffractive optical elements working as optical coupling elements diffract an incoming light beam into an oblique angle within the range from 40 to ~80 degrees.