发明名称 SEMICONDUCTOR DEVICE AND A PROCESS FOR FORMING THE SAME
摘要 A semiconductor device (10) has a conductor that overlies an insulating layer (14) and has a first conductive portion (20), a second conductive portion (30), and a third conductive portion (40). The second conductive portion (30) lies between the first (20) and third conductive (40) portions. The first conductive portion (20) has a first element, and the third conductive portion (40) includes a metal and silicon without a significant amount of the first element. The conductor may be a gate electrode or a capacitor electrode.
申请公布号 WO0209178(A2) 申请公布日期 2002.01.31
申请号 WO2001US22660 申请日期 2001.07.18
申请人 MOTOROLA, INC. 发明人 SAMAVEDAM, SRIKANTH, B.;TOBIN, PHILIP, J.;TAYLOR, WILLIAM, J., JR.
分类号 H01L21/28;H01L29/423;H01L29/49;H01L29/78;H01L29/786 主分类号 H01L21/28
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