发明名称 |
SEMICONDUCTOR DEVICE AND A PROCESS FOR FORMING THE SAME |
摘要 |
A semiconductor device (10) has a conductor that overlies an insulating layer (14) and has a first conductive portion (20), a second conductive portion (30), and a third conductive portion (40). The second conductive portion (30) lies between the first (20) and third conductive (40) portions. The first conductive portion (20) has a first element, and the third conductive portion (40) includes a metal and silicon without a significant amount of the first element. The conductor may be a gate electrode or a capacitor electrode. |
申请公布号 |
WO0209178(A2) |
申请公布日期 |
2002.01.31 |
申请号 |
WO2001US22660 |
申请日期 |
2001.07.18 |
申请人 |
MOTOROLA, INC. |
发明人 |
SAMAVEDAM, SRIKANTH, B.;TOBIN, PHILIP, J.;TAYLOR, WILLIAM, J., JR. |
分类号 |
H01L21/28;H01L29/423;H01L29/49;H01L29/78;H01L29/786 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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