发明名称 Photoreceptor array for optical encoder, has photoreceptors formed from semiconductor layer buried in trenches formed on insulating layer
摘要 An insulating layer (41) having trenches, is formed on a transparent substrate. Multiple photoreceptors formed from semiconductor layers, are buried in the trenches. An output signal line is formed on the photoreceptors via an interlayer insulator. Independent claims are also included for the following: (a) Optical encoder; (b) Method of manufacturing photoreceptor array
申请公布号 DE10129334(A1) 申请公布日期 2002.01.31
申请号 DE20011029334 申请日期 2001.06.19
申请人 MITUTOYO CORP., KAWASAKI 发明人 AOKI, TOSHIHIKO
分类号 H01L31/10;G01D5/38;H01L27/146;H01L31/12;(IPC1-7):H01L27/144 主分类号 H01L31/10
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