发明名称 SEMICONDUCTOR WAFER
摘要 <p>PROBLEM TO BE SOLVED: To provide an inspection pad for inspecting an IC chip, and to realize a smaller IC chip. SOLUTION: IC chip 2 is isolated, and on a scribe line 3 which is later cut, an inspection pad 4 electrically connected to an internal circuit of the IC chip 2 is formed. The inspection pad 4 is used for inspecting the behavior of the IC chip 2 in an inspection process, and is cut off together with the scribe line 3 in a cut process.</p>
申请公布号 JP2002033361(A) 申请公布日期 2002.01.31
申请号 JP20000215746 申请日期 2000.07.17
申请人 MITSUMI ELECTRIC CO LTD 发明人 MIKI KENICHI;TERADA YUKIHIRO
分类号 G01R31/28;H01L21/66;H01L21/822;H01L23/485;H01L23/58;H01L27/04;(IPC1-7):H01L21/66 主分类号 G01R31/28
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