| 摘要 |
<p>A fluid mass flow control apparatus (10), comprises a first elongated tube (28) connected to an inlet fitting (20) and a capsule-like valve housing (38) and a second elongated tube (30) connected to the inlet fitting (20) and the valve housing (38) and including a flow sensor (30, 31, 33, 35). The valve housing (38) is connected to a magnetostrictive actuator (54) including an elongated actuator member (88) disposed in a conduit (90) connected to the valve housing (38) and serving as part of the fluid flow path through the apparatus (10). An electromagnetic coil (58) is disposed about the conduit (90) and the actuator member (88) and is responsive to energization to effect controlled elongation of the actuator member (88) to control the position of a valve closure member (42) disposed in the valve housing (38).</p> |
