发明名称 ELECTRONIC MICROSCOPE OBSERVATION SYSTEM AND OBSERVATION METHOD
摘要 An electronic microscope observation system and observation method, which reduce an initial investment of an operator, require no device maintenance, and prepare samples easily and accurately. The system comprises an electronic microscope (4), an observation center (1)-side image display device (6), a transmission line (13) for transmitting image signals, and an operation center (2)-side image display device (7), wherein the two image display devices display an observation reservation/approval screen, a sample processed by the observation center side is mounted based on an instruction given by the operation center, the sample is observed based on sample observation condition information to display observation images on the two image display devices, and at the same time a charge processing is performed based on an observation content levels including sample processing and total hours used by the electronic microscope to display the result of charging.
申请公布号 WO0209142(A1) 申请公布日期 2002.01.31
申请号 WO2000JP05004 申请日期 2000.07.26
申请人 HITACHI, LTD.;TODOKORO, HIDEO 发明人 TODOKORO, HIDEO
分类号 G01N23/04;G01Q30/02;G01Q30/04;H01J37/26;H01J37/28;(IPC1-7):H01J37/24;G01N23/225 主分类号 G01N23/04
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