SEMICONDUCTOR FABRICATING EQUIPMENT WITH ALIEN SUBSTANCE CLEANING DEVICE

摘要

PURPOSE: A semiconductor fabricating equipment with an alien substance cleaning device is provided to remove alien substances or impurities from a wafer or a reticle. CONSTITUTION: An air injection portion(402) is connected with an air supply source(428). The air injection portion(402) has a regulator(426) for controlling a pressure of air supplied from the air supply source(428). The regulator(426) is operated manually or automatically by a sense signal from a sensor and a control signal from a control portion. The first solenoid valve(427) is arranged between the air supply source(428) and the regulator(426). Impurities passing the regulator(426) are filtered by a filter(425). The air passing the filter(425) is injected to a bottom of a wafer by an air shower(420). An alien substance absorption portion(401) is connected with a vacuum supply source(414). The alien substance absorption portion(401) is formed with a vacuum duct(410) and the second solenoid valve(412).