| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card whose mechanical strength at room temperature and a high temperature is superior, which does not generate a contact defect with a probe, a warpage, a deformation or the like even at the high temperature and whose temperature matching to quickly follow the temperature rise and the high temperature of a silicon wafer is fast. SOLUTION: The probe card is used to inspect an integrated circuit which is formed on a semiconductor wafer. The probe card is composed of a ceramics substrate made of a nonoxidizing ceramics.
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