| 摘要 |
PROBLEM TO BE SOLVED: To overcome the problem such that a yield is lowered due to an unevenness of a coupling efficiency caused by a misalignment of an essential part from an alignment pattern, based on a formation of the part and the pattern by separate masks for an optical element and a substrate for constituting an optical module. SOLUTION: The optical module comprises the optical element having a metal mark formed for the alignment, and an Si substrate 5 having an etching mark 7 formed of the same process as that for the same mask as that of a V-groove 6 for mounting an optical fiber.
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