| 摘要 |
PROBLEM TO BE SOLVED: To prevent exposure of the sample surface caused by scattering of a part of light emitted from a semiconductor laser for shape measurement, and by irradiation of the surface of a sample having photosensitivity. SOLUTION: When a cantilever having the head on which a probe is mounted is provided and the physical quantity of a sample is measured from displacement or vibration of the prove caused by a force working between the sample having photosensitivity and the probe arranged oppositely thereto, a light source for emitting light having a wavelength by which the sample is not exposed is installed, and a reflecting mirror for reflecting light emitted from the light source is mounted on the cantilever, and a light-receiving element for receiving light reflected by the reflecting mirror is installed. Hereby, the state of the sample surface is not disturbed by light from the light source, to thereby improve measurement precision.
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