发明名称 |
METHOD FOR MANUFACTURING LIGHT EMITTING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a technique for manufacturing a self-light emitting device by a method of forming a thin film having high uniformity of film thickness distribution in a high throughput. SOLUTION: This method comprises sealing a low molecular organic electroluminescence material in a vapor cell having an orifice-like evaporated material blowout port, heating the low molecular organic electroluminescence material in an inert gas atmosphere, and forming a luminescent layer consisting of the low molecular organic electroluminescence material on a substrate.
|
申请公布号 |
JP2002033190(A) |
申请公布日期 |
2002.01.31 |
申请号 |
JP20010142465 |
申请日期 |
2001.05.11 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
ARAI YASUYUKI |
分类号 |
H05B33/10;C23C14/12;H01L51/50;H05B33/12;H05B33/14;(IPC1-7):H05B33/10 |
主分类号 |
H05B33/10 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|