发明名称 METHOD FOR MANUFACTURING LIGHT EMITTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a technique for manufacturing a self-light emitting device by a method of forming a thin film having high uniformity of film thickness distribution in a high throughput. SOLUTION: This method comprises sealing a low molecular organic electroluminescence material in a vapor cell having an orifice-like evaporated material blowout port, heating the low molecular organic electroluminescence material in an inert gas atmosphere, and forming a luminescent layer consisting of the low molecular organic electroluminescence material on a substrate.
申请公布号 JP2002033190(A) 申请公布日期 2002.01.31
申请号 JP20010142465 申请日期 2001.05.11
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 ARAI YASUYUKI
分类号 H05B33/10;C23C14/12;H01L51/50;H05B33/12;H05B33/14;(IPC1-7):H05B33/10 主分类号 H05B33/10
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