发明名称 Semiconductor device and production method thereof
摘要 A semiconductor device that makes it possible to restrain the increase of the junction capacitance and others while preventing the punch-through and others accompanying the scale reduction, and a production method thereof are obtained. The semiconductor device includes source and drain regions of first conductivity type disposed to sandwich a channel region, and a pair of pocket injection regions of second conductivity type that cover only a neighborhood of side surface parts of the source and drain regions on the channel region side and respectively form a junction only between the neighborhood of the side surface parts and the pocket injection regions.
申请公布号 US2002011635(A1) 申请公布日期 2002.01.31
申请号 US20000735656 申请日期 2000.12.14
申请人 ABE YUJI;MIURA NARUHISA;SUGIHARA KOHEI;OISHI TOSHIYUKI;TOKUDA YASUNORI 发明人 ABE YUJI;MIURA NARUHISA;SUGIHARA KOHEI;OISHI TOSHIYUKI;TOKUDA YASUNORI
分类号 H01L29/78;H01L21/336;H01L21/8238;H01L27/092;(IPC1-7):H01L31/119;H01L31/113;H01L29/94;H01L31/062 主分类号 H01L29/78
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