| 发明名称 |
POLISHING PAD AND MANUFACTURING METHOD THEREFOR |
| 摘要 |
PURPOSE: To provide a polishing pad capable of obtaining stable grinding performance. CONSTITUTION: A sheet including one and more kinds of abrasive grains is spirally wound in a cylindrical shape, and a cutting surface thereof is used as a grinding surface. |
| 申请公布号 |
KR20020008753(A) |
申请公布日期 |
2002.01.31 |
| 申请号 |
KR20010041434 |
申请日期 |
2001.07.11 |
| 申请人 |
ROKITECHNO CO., LTD. |
发明人 |
SUZUKI MAKOTO;TOMINAGA SHIGERU |
| 分类号 |
B24B37/00;B24B37/04;B24B37/20;B24B37/22;B24D11/00;H01L21/304;(IPC1-7):H01L21/304 |
主分类号 |
B24B37/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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