发明名称 CAPACITIVE ELEMENT IN SEMICONDUCTOR INTEGRATED CIRCUIT AND ITS POWER SUPPLY LINE
摘要 PROBLEM TO BE SOLVED: To provide a power supply line in a semiconductor integrated circuit in which parasitic capacitance between power supply lines is increased without increasing the area of the semiconductor integrated circuit and, as a result, noise on the power supply line is absorbed and the effect of external noise is eliminated. SOLUTION: Positive power supply line layers 45 and negative power supply line layers 46 are arranged alternatelyat a specified interval on a first interconnect layer 13. Negative power supply line layers 47 facing the positive power supply line layers 45 and positive power supply line layers 48 facing the negative power supply line layers 46 are arranged alternately at a specified interval on a second interconnect layer 14. Interdigitatal parts 31, 32 provided at the end of the positive power supply line layers 45 and 48, respectively, are connected electrically through via holes 21. Interdigitatal parts 33, 34 provided at the end of the negative power supply line layers 46 and 47, respectively, are connected electrically through via holes 22.
申请公布号 JP2002033456(A) 申请公布日期 2002.01.31
申请号 JP20000217697 申请日期 2000.07.18
申请人 SEIKO EPSON CORP 发明人 KASAI JUICHI
分类号 H01L27/04;H01L21/822;(IPC1-7):H01L27/04 主分类号 H01L27/04
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