VIBRATION RESISTANT DEVICE

摘要

PROBLEM TO BE SOLVED: To reduce the height of a vibration resistant device wherein a pressure air chamber which can be expanded and contracted vertically and a pressure air chamber which can be expanded and contracted horizontally are formed between a fixed table and a movable table through a flexible air tight member respectively. SOLUTION: In this vibration control device wherein vertical vibration is prevented from being transmitted to the movable table 30 by holding the movable table 30 and the articles placed on the movable table 30 floating by introducing the pressurized air of a compression air source into the pressure air chamber 40 in the perpendicular direction through a perpendicular pressure controlling system with the air pressure adjusted according to the weight of the movable table 30 and the articles placed on the movable table 30. At the same time, the horizontal vibration of the movable table 30 can also be prevented by introducing pressurized air into a pair of horizontal pressure air chambers 50 through a horizontal pressure control system with the air pressure adjusted, a flexible air tight member for forming the horizontal pressure air chamber 50 is made from a oblong bellows 51.