发明名称 Verfahren zur Herstellung einer sehr dicken Dickschicht zur Kontrolle der thermischen und stromführenden Eigenschaften von Hybridschaltungen
摘要 Disclosed is an ultra-thick thick film (30) of copper or silver or other suitable conductor material for use in spreading heat laterally, i.e., in the x and y directions, along a substrate (32). A substrate (32) of suitable thickness is chosen to dissipate heat in the vertical, i.e., z-direction, underneath a heat-generating component such as a semiconductor chip (26). The ultra-thick films (30) have a thickness ranging from about 50.8 mu m (2 mils) to about 127 mu m (5 mils) and are prepared from metal powders having average particles sizes ranging from about 1 micrometre to 3 micrometres. <IMAGE>
申请公布号 DE69428070(T2) 申请公布日期 2002.01.31
申请号 DE1994628070T 申请日期 1994.03.07
申请人 DELPHI TECHNOLOGIES, INC. 发明人 MYERS, BRUCE ALAN;KOLLIPARA, ANIL KUMAR;SARMA, DWADASI HARE RAMA;PALANISAMY, PONNUSAMY
分类号 H01L21/52;H01L23/12;H01L23/373;H05K7/06;H05K7/20 主分类号 H01L21/52
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