| 摘要 |
PURPOSE: An ellipsometer in a synchronized rotational element type is provided to reduce loss of time while operating a device by removing calibration process through synchronizing polarized light generator and a polar analyzer. CONSTITUTION: An ellipsometer of a synchronized rotational element type comprises a polarized light generating device(20) rotating by polarizing light reflected from sample; a polarized light analyzing device(30) analyzing the polarized light reflected form the sample while passing the polarized light toward a specific direction; a detector(40) changing the polarized light passed through the polarized light analyzing device into an electric signal; an A/D(Analogue to Digital) converter changing the electric signal into a number by being mounted on an interface(50); and a computer(60) receiving the value of the electric signal from the A/D converter. Thereby, the ellipsometer of the synchronized rotational element reduces loss of time by removing a calibration process through synchronizing the polarized light generator and the polar analyzer.
|
