| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a reticle for measuring effectiveσwhich accurately and easily measures variation inσwithin an exposure field. SOLUTION: A reticle 10 for measuring effectiveσcomprises a reticle main body 12 for measuring effectiveσand a light-shielding film 16 which is provided below a reticle main body and comprises a pin hole 14. The reticle main body comprises an effectiveσevaluating pattern at each field position provided in a specified arrangement. Related to each effectiveσevaluating pattern, a plurality of straight line patterns 22 radially extend outward from a pattern center 20 at equi-angle interval. Each straight pattern is provided with, with reading at the pattern center being 0, graduation from 0 to 1, or, graduation from 0 to maximumσ. The light-shielding film is provided with pin holes of the same arrangement and number with the effectiveσevaluating pattern. The light-shielding film is so provided below the reticle main body that the pin hole is positioned directly below the pattern center (graduation 0). The graduation pattern is so provided that a reading at a position across the graduation pattern of the reticle main body is x when the irradiation light emitted from a point light source corresponding toσ=x passes through the pin hole.</p> |
