IC TESTER, REFERENCE POSITION SETTING EQUIPMENT FOR ITS TEST HEAD, AND CONNECTION POSITION CONTROLLING METHOD FOR ITS CONNECTION MECHANISM

摘要

PROBLEM TO BE SOLVED: To allow pogo pins accurately and surely make contact with a probe card by permitting an interval, when connecting a test head of an IC tester to a wafer prober to be constant. SOLUTION: Related to an IC tester 1, when connecting a test head 10 to a wafer prober 40 for performing a test, a distance sensor 21 provided to a pogo ring 20 measures the distance between the test head 10 and the wafer prober 40, and adjusts a stop position so that the distance is within a specified range. Thus, the interval between the test head 10 and the wafer prober 40 is kept constant every time they are connected, so the pogo pins 30 accurately and surely make contacts with prescribed positions of a probe card 50.