| 摘要 |
PROBLEM TO BE SOLVED: To prevent the occurrence of speckles in a formed image. SOLUTION: An aligner is provided with an illuminator 1 and exposing sections 2A-2D which perform exposure by using light beams, based on the light emitted from the illuminator 1. The illuminator 1 is provided with a plurality of light sources 11A-11D, which emit pulsed light rays having slightly different center wavelengths, an oscillation control section 12 which controls oscillating timing, so that the pulsed light rays emitted from the light sources 11A-11D do not overlap each other, and a multiplexer 13, which outputs the pulsed light rays emitted from the light sources 11A-11D by multiplexing the light beams upon another.
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