| 摘要 |
PROBLEM TO BE SOLVED: To properly perform quality control, based on the number or density of defects in a semiconductor manufacturing process by using a plurality of sets of inspection equipment which have different inspection sensitivity. SOLUTION: The quality control is conducted properly, correcting the difference in inspection sensitivity for each equipment by finding in advance a relative correction factor at each equipment and correcting the inspected results of the product from each equipment for the number or density of defects, by using the correction factor.
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