发明名称 |
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a technology for fabricating a high performance opto electronic device using a plastic support. SOLUTION: A first fixed substrate 101 and an element forming substrate 103 of resin are stuck through a first adhesion layer and then a semiconductor element and a light emitting element are formed on the element forming substrate. A second fixed substrate 106 of resin is then stuck onto the light emitting element through a second adhesion layer 107. Subsequently, it is irradiated with YAG laser under that state thus removing the first adhesion layer 102 and separating or stripping the first fixed substrate 101. |
申请公布号 |
JP2002033464(A) |
申请公布日期 |
2002.01.31 |
申请号 |
JP20000216690 |
申请日期 |
2000.07.17 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
YAMAZAKI SHUNPEI;TAKAYAMA TORU |
分类号 |
G09F9/30;H01L21/02;H01L21/336;H01L27/08;H01L27/12;H01L27/32;H01L29/786 |
主分类号 |
G09F9/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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