| 摘要 |
PROBLEM TO BE SOLVED: To accurately binarize height data H read out of a substrate 1. SOLUTION: This processor is equipped with distance measuring means 7, 9, and 10 which measure and write pieces of height data at respective positions on the top surface of the substrate to a height data file 11, an area dividing means 12 which divides the pieces of height data in the height data file corresponding to respective small areas 11a, a histogram generating means 13 which generates a histogram 16 of the pieces of height data belonging to the respective areas, a slit detecting means 17 which decides whether or not a slit is present in each small area according to the histogram, a threshold calculating means 19 which calculates thresholds (d) from the histogram in each of small areas wherein no slit is detected, and a binarization processing means 21 which binarizes the pieces of height data of the small areas by using the thresholds of the small areas. |
