发明名称 PIEZOELECTRIC/ELECTROSTRICTIVE DEVICE AND MANUFACTURING METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To allow large displacement of a movable part in a specific axial direction while a voltage applied to a piezoelectric/electrostrictive element is low. SOLUTION: A piezoelectric/electrostrictive device 10 comprises a pair of, facing each other, thin plates 16a and 16b, a movable part 20, and a fixed part 22 which supports the thin plates 16a and 16b as well as the movable part 20. The pair of thin plates 16a and 16b are provided with at least one piezoelectric/electrostrictive element 24a and 24b. Inside walls of the pair of thin plates 16a and 16b, an inside wall 20a of the movable part 20, and an inside wall 22a of the fixed part 22 constitute a hole 12. Here, the pair of thin plates 16a and 16b are deflected in such direction as approaching each other in advance to provide protruding shapes toward inside of the hole 12.
申请公布号 JP2002033530(A) 申请公布日期 2002.01.31
申请号 JP20000278523 申请日期 2000.09.13
申请人 NGK INSULATORS LTD 发明人 TAKEUCHI YUKIHISA;NANATAKI TSUTOMU;KIMURA KOJI
分类号 B81B3/00;B81C1/00;H01L41/083;H01L41/09;H01L41/187;H01L41/22;H01L41/314;H01L41/338;H01L41/43;H02N2/00 主分类号 B81B3/00
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