METHOD AND DEVICE FOR CONTROLLING POSITION AND SPEED OF PIEZOELECTRIC ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a device and a method for accurately controlling the movement of a piezoelectric element. SOLUTION: A control system is provided with a speed control circuit to be driven so as to generate a 3rd control signal for receiving a position deviation control signal and driving the piezoelectric element up to a required position at a required speed. A piezoelectric element control circuit is connected to a position control circuit and the speed control circuit so as to drive these circuits and generates a 4th control signal in accordance with the 3rd control signal for driving the piezoelectric element up to the required position at the required speed so that the piezoelectric element reaches the required position and moves to the required position in accordance with the required speed profile.