| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a means for fast precision drilling and for free alignment of drilling with no use of a mask in green sheet working which uses laser. SOLUTION: There are provided an LD excitation laser oscillator 1, a field lens 2, an imaging lens 4, and an XY table 9. A green sheet 5, which is to be worked, is placed as an XY table. The laser oscillated from a laser rod of the oscillator 1 is end-surface focused on the green sheet on the XY table through the field lens 2 and the imaging lens 4, so that a given shape is projected on the green sheet for drilling.</p> |
