| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a film having piezoelectric characteristics as well as various piezoelectric elements of high reliability and quality, by achieving safe fine working with no damage on a base material for easy fine working where etching is controlled in depthwise direction of a film while a film itself can be taken out. SOLUTION: On a surface or a backside of a parent phase film 13, or in the film, which is formed on a substrate 11 and has a piezoelectric characteristics, a protective layer 14 better in corrosion resistance than the parent phase film 13 is formed for fine working. |
