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发明名称
GAS FOR PLASMA REACTION AND METHOD FOR PRODUCTION THEREOF
摘要
申请公布号
KR20020008841(A)
申请公布日期
2002.01.31
申请号
KR1020017013339
申请日期
2001.10.19
申请人
发明人
分类号
C23C16/50
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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