发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and its manufacturing method that can reduce nonuniformity in thickness, without blocking the spread of an insulating layer in a process for applying the insulating layer for planarization treatment. SOLUTION: This semiconductor device has a first wiring conductive layer 21 that is formed on a semiconductor substrate 1; the first insulating layer 31 that is formed while covering the first wiring conductive layer 21; the inorganic second insulating layer 32 that is formed on the side of a stage part 31A that is generated on the surface of the first insulating layer 31 on the first insulating layer 31, so that the stage part 31A can be flattened; the third insulating layer 33 that is formed on the second insulating layer 32; and a second wiring conductive layer 22 that is formed on the third insulating layer 33. In this case, a slit SL is formed in the first wiring conductive layer 21, and the part between the slits SL is electrically connected by a second wiring conductive layer 22.
申请公布号 JP2002033388(A) 申请公布日期 2002.01.31
申请号 JP20000215941 申请日期 2000.07.17
申请人 SONY CORP 发明人 FUJISAWA TOMOTAKA
分类号 H01L21/768;H01L31/10;(IPC1-7):H01L21/768 主分类号 H01L21/768
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