| 摘要 |
<p>An inspection apparatus with probe card capable of properly inspecting an inspected object even at the time of heating and cooling, comprising a performance substrate having inspection terminals disposed thereon, a contactor substrate having probes coming in contact with the inspected object disposed thereon, and a probe card provided between the probes disposed on the contactor substrate and the terminals of the performance substrate, characterized in that the probe card is a multilayer substrate formed by laminating resin film on a ceramic plate.</p> |
