发明名称 METHOD AND APPARATUS FOR REMOVAL OF MINUTE PARTICLES FROM A SURFACE USING THERMOPHORESIS TO PREVENT PARTICLE REDEPOSITION
摘要 <p>A method and apparatus for removing minute particles (22) from a surface (21) of a sample (20) are provided that prevent redeposition of the particles (22) onto the surface (21). By combining thermophoresis with laser assisted particle removal (LAPR), the methods and apparatus remove minute particles (for example, micrometer and nanometer sizes) and assure that they will not redeposit.</p>
申请公布号 WO2002007925(A1) 申请公布日期 2002.01.31
申请号 US2001021112 申请日期 2001.07.24
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