发明名称 Crystal holding apparatus
摘要 In a crystal holding apparatus, a corrugated portion between a seed crystal and a straight cylindrical portion of a crystal is held by a lifting jig during a single-crystal growing process wherein the seed crystal is brought into contact with material melt and is subsequently pulled while being rotated. The tip end portion of the lifting jig is composed of a swinging portion having a short stroke which swings to hold or release the corrugated portion. A lock mechanism is also provided in order to swing the swinging portion for opening/closing operation and to lock the swinging portion. Accordingly, it is possible to reliably hold the corrugated portion of a crystal while the crystal is pulled in accordance with the CZ method, for example.
申请公布号 EP0831157(B1) 申请公布日期 2002.01.30
申请号 EP19970306926 申请日期 1997.09.05
申请人 SHIN-ETSU HANDOTAI COMPANY LIMITED 发明人 NAKAMURA, YASUSHI;OTSUKA, SEIICHIRO
分类号 C30B15/30;C30B15/32;C30B29/06;H01L21/208;(IPC1-7):C30B15/30 主分类号 C30B15/30
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