DIELECTRIC RESONATOR AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A dielectric resonator and a manufacturing method thereof are provided to drastically reduce a length of a feed line and improve performance of the feed line. CONSTITUTION: A dielectric is embedded in a silicon substrate(11) and filled in a cavity separated from the substrate(11) by the first metal layer. The second metal layer is connected with the first metal layer on an upper surface of the dielectric and provided with a slot of a hole shape which exposes a part of the dielectric. An insulating film(17) is formed on an upper part of the second metal layer including the exposed dielectric, and provided with a plurality of via contacts(18A-18D) which are in contact with the second metal layer. Ground plates(19A,19B) are formed on right and left edges of an upper part of the insulating film(17), and respectively connected with the second metal layer through the via contacts(18A,18D). Feed lines(20A,20B) are separately patterned at the center of an upper part of the insulating film(17) and respectively connected to the second metal layer through the via contacts(18B,18C).