发明名称 |
THIN FILM TRANSISTOR, LIQUID CRYSTAL DISPLAY DEVICE, AND ELECTROLUMINESCENCE DISPLAY DEVICE |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a thin film transistor which is excellent in both initial characteristics and reliability in manufacturing the thin film transistor, a liquid crystal display device, and an electroluminescence display device. SOLUTION: A thin film transistor is formed, using a gate insulating film having fixed electric charge of 2×1015 cm-3 to 5×1017 cm-3, interface state density of 1×1010 cm-2eV-1 to 7×1012 cm-2eV-1, and an electric field of 6 MVcm-1 to 11 MVcm-1 when a current of 1×10-3 A.cm-2 flows.</p> |
申请公布号 |
JP2002026334(A) |
申请公布日期 |
2002.01.25 |
申请号 |
JP20000211051 |
申请日期 |
2000.07.12 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
KITAMURA KAZUKI;KAWAKITA TETSUO |
分类号 |
G02F1/136;G02F1/1368;G09F9/30;H01L21/205;H01L21/316;H01L21/336;H01L27/32;H01L29/786;(IPC1-7):H01L29/786 |
主分类号 |
G02F1/136 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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