| 摘要 |
PROBLEM TO BE SOLVED: To provide a discharge laser provided with a high-speed wavelength correcting device composed of at least one piezoelectric drive, a high-speed wavelength measuring system, a high-speed feedback responding system, a relatively gentle stepper motor, and a high-speed piezoelectric driver for laser wavelength adjustment using a tuning mirror. SOLUTION: The discharge laser is provided with the high-speed wavelength correcting device containing at least one piezoelectric drive, the high-speed wavelength measuring system, and the high-speed feedback responding system. In a desirable embodiment, a device which controls laser wavelength in a low- speed temporal framework of several milliseconds, an intermediate temporal framework of about 1-3 milliseconds, and a very high-speed temporal framework of several microseconds is prepared. The used technology includes the combination of the relatively gentle stepper motor and the high-speed piezoelectric driver for laser wavelength adjustment using the tuning mirror. A preferable control technology is explained (by using very high-speed wavelength monitoring device) and, in order to bring about low-, medium-, and very high-speed (several microseconds) wavelength control, a piezoelectric load cell combined with the piezoelectric driver is provided.
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