| 摘要 |
PROBLEM TO BE SOLVED: To provide an AlGaInAs-based high-performance, high-reliability, ridge-waveguide semiconductor laser and a method of manufacturing the same. SOLUTION: Since the upper face of a p-AlInAs clad layer 7 is directly covered by a p-InGaAsP etch-stopper layer 8, the p-AlInAs clad layer 7 is not exposed to atmospheric air during processing, therefore no reliability problem due to oxidation of the p-AlInAs clad layer 7 occurs. In addition, since the upper face of the p-AlInAs clad layer 7 is directly covered with the p-InGaAsP etch-stopper layer 8, the etching in forming the ridge can be stopped by the p-InGaAsP etch-stopper layer 8.
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