发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device having a highly sensitive movable part. SOLUTION: The movable part of semiconductor can be increased in mass, rigidity, and structural strength by plating. A semiconductor device in which only the wall surface of an etched hole is plated can be easily formed by the use of a SOI substrate.
申请公布号 JP2002026338(A) 申请公布日期 2002.01.25
申请号 JP20000203612 申请日期 2000.07.05
申请人 TOYOTA CENTRAL RES & DEV LAB INC 发明人 FUJITSUKA TOKUO;TSUKADA ATSUSHI;MIZUNO KENTAROU
分类号 G01P9/04;B81B3/00;B81C1/00;G01C19/56;G01P15/125;H01L29/84 主分类号 G01P9/04
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