发明名称 HOT PLATE UNIT
摘要 PROBLEM TO BE SOLVED: To provide a hot plate unit which assures sufficiently rapid rise and fall of temperature, even if the diameter of the base board enlarges and capable of embodying a small-size construction of the device. SOLUTION: The hot plate unit includes a base board which is furnished with a temperature regulating means and installed in a supporting vessel, whose thickness is under 50 mm.
申请公布号 JP2002025758(A) 申请公布日期 2002.01.25
申请号 JP20000305175 申请日期 2000.10.04
申请人 IBIDEN CO LTD 发明人 HIRAMATSU YASUJI;ITO YASUTAKA
分类号 H01L21/00;H01L21/027;H05B1/02;H05B3/14;H05B3/16;H05B3/18;H05B3/28;H05B3/68;(IPC1-7):H05B3/68 主分类号 H01L21/00
代理机构 代理人
主权项
地址